中圖分類號： TN713 文獻標(biāo)識碼： A DOI：10.16157/j.issn.0258-7998.211351 中文引用格式： 濮澤宇,，萬晶,，王霄，等. 一種基于MEMS的小型化雙通帶寬帶濾波器芯片[J].電子技術(shù)應(yīng)用,，2021，47(7)：48-51,，56. 英文引用格式： Pu Zeyu,，Wan Jing,，Wang Xiao，et al. A miniaturized MEMS-based dual passband broadband filter chip[J]. Application of Electronic Technique,，2021，47(7)：48-51,，56.
A miniaturized MEMS-based dual passband broadband filter chip
Pu Zeyu1,，2,，Wan Jing2，3,，Wang Xiao2，3,，Li Yuehua1,，Liang Xiaoxin2,，3
1.Nanjing University of Science & Techonlogy，Nanjing 210094,，China； 2.Institute of Microelectronic Technology of Kunshan,，Kunshan 215347，China,； 3.Institute of Microelectronics,，Chinese Academy of Sciences，Beijing 100029,，China
Abstract： This paper analyzes and designs a silicon based substrate integrated waveguide(SIW) dual passband broadband bandpass filter chip based on Micro-Electro-Mechanical System(MEMS) process with double layer resonant cavity filter structure. The designed filter chip has an insertion loss of less than 2 dB in the 23～29 GHz and 43～47 GHz dual passband bands with relative bandwidths of 23% and 9%, respectively, and an out-of-band suppression of more than 20 dB, and generates a zero point between the dual passbands with a size of only 4.2 mm×1.1 mm×0.8 mm. The filter is a planar stacked structure, with the advantages of small size, wide band and easy integration, which has good application value.
Key words : dual-passband,；broadband；bandpass filter,；SIW；MEMS
