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基于MEMS微鏡的混合式掃描同步設(shè)計(jì)
2021年電子技術(shù)應(yīng)用第7期
周 玨1,2,吳東岷2
1.中國科學(xué)技術(shù)大學(xué) 微電子學(xué)院,,安徽 合肥230026,; 2.中國科學(xué)院蘇州納米技術(shù)與納米仿生研究所,江蘇 蘇州215000
摘要: 為了解決MEMS微鏡掃描角度較小的缺點(diǎn),,設(shè)計(jì)了一種MEMS微鏡與無刷電機(jī)同步掃描系統(tǒng),。該系統(tǒng)由STM32微控制器、DDS驅(qū)動(dòng)電路,、相位檢測(cè)電路組成,。通過設(shè)計(jì)光柵碼盤實(shí)現(xiàn)對(duì)無刷電機(jī)速度的測(cè)量,由PID算法控制電機(jī)轉(zhuǎn)速使電機(jī)反饋信號(hào)與MEMS微鏡反饋信號(hào)頻率相同,,并檢測(cè)兩路反饋信號(hào)的相位差,,調(diào)節(jié)DDS驅(qū)動(dòng)信號(hào)的相位實(shí)現(xiàn)相位同步。實(shí)驗(yàn)表明,,系統(tǒng)工作穩(wěn)定,,相位誤差不超過1.5%。
中圖分類號(hào): TP273+.5,;TN41
文獻(xiàn)標(biāo)識(shí)碼: A
DOI:10.16157/j.issn.0258-7998.211300
中文引用格式: 周玨,,吳東岷. 基于MEMS微鏡的混合式掃描同步設(shè)計(jì)[J].電子技術(shù)應(yīng)用,2021,,47(7):92-96.
英文引用格式: Zhou Jue,,Wu Dongmin. Design of hybrid scanning synchronization based on MEMS micromirror[J]. Application of Electronic Technique,2021,,47(7):92-96.
Design of hybrid scanning synchronization based on MEMS micromirror
Zhou Jue1,,2,Wu Dongmin2
1.School of Microelectronics,University of Science and Technology of China,,Hefei 230026,,China; 2.Suzhou Institue of Nano-Tech and Nano-Bionics,,Chinese Academy of Sciences,,Suzhou 215000,China
Abstract: In order to solve the shortcoming of narrow scanning angle of micro-electro-mechanical system(MEMS) micromirror,a synchronous scanning system of MEMS micromirror and brushless motor was designed.The system consists of STM32 microcontroller,direct digital synthesis(DDS) drive circuit,and phase detection circuit.The speed measurement of the brushless motor is realized by designing the grating code disc.The proportion integration differentiation(PID) algorithm controls the motor speed so that the motor feedback signal and the MEMS micromirror feedback signal have the same frequency and the phase difference of the two feedback signals can be detected. Adjust the phase of DDS drive signal to achieve phase synchronization.Experiments show that the system works stably and the phase error does not exceed 1.5%.
Key words : MEMS,;STM32 microcontroller,;DDS;laser scanning; phase synchronization

0 引言

    激光掃描在激光雕刻,、激光雷達(dá),、激光精密打標(biāo)等領(lǐng)域都有廣泛的應(yīng)用。目前激光掃描方式主要分為振鏡掃描,、MEMS(Micro-Electro-Mechanical System)微鏡掃描以及轉(zhuǎn)鏡掃描[1],。

    振鏡掃描是指振鏡電機(jī)帶動(dòng)反射鏡偏轉(zhuǎn),進(jìn)而使入射到反射鏡表面的光束發(fā)生偏轉(zhuǎn),,實(shí)現(xiàn)掃描[2],。振鏡掃描方式由于其機(jī)械結(jié)構(gòu)導(dǎo)致其掃描速度較慢,掃描頻率一般為20 Hz左右,,掃描角度一般為20°×20°,。

    MEMS微鏡采用微機(jī)電系統(tǒng)工藝,相比機(jī)械振鏡具有體積小,、諧振頻率高,、光學(xué)特性好的優(yōu)點(diǎn)[3],由于其工作在諧振頻率處,,快軸掃描頻率能達(dá)到27 kHz,,掃描角度一般為40°×10°[4]

    轉(zhuǎn)鏡掃描是一種比較常見的機(jī)械掃描方式,,其物面掃描點(diǎn)的形狀是線狀的,。有些商業(yè)LIDAR(Light Detection and Ranging)系統(tǒng)采用這種方式。轉(zhuǎn)鏡掃描具有轉(zhuǎn)速高,、掃描速度大,、穩(wěn)定性好的優(yōu)點(diǎn)[5]。但轉(zhuǎn)鏡相比MEMS微鏡,,掃描圖像分辨率較低,。




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作者信息:

周  玨1,,2,,吳東岷2

(1.中國科學(xué)技術(shù)大學(xué) 微電子學(xué)院,安徽 合肥230026;

2.中國科學(xué)院蘇州納米技術(shù)與納米仿生研究所,,江蘇 蘇州215000)



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