基于阻抗匹配器的二極管幅-相檢測(cè)電路設(shè)計(jì)
電子技術(shù)應(yīng)用
姚龍,，李曉峰,，馬聰偉，郭徽
（季華實(shí)驗(yàn)室,， 廣東 佛山 528000）
摘要： 半導(dǎo)體芯片領(lǐng)域的競(jìng)爭(zhēng)很大程度上取決于半導(dǎo)體裝備以及核心零部件的競(jìng)爭(zhēng),，如射頻電源、阻抗匹配器等,。設(shè)備的抗干擾能力以及穩(wěn)定性等特性是衡量設(shè)備優(yōu)劣的重要標(biāo)準(zhǔn),。對(duì)于阻抗匹配器而言，控制回路的精準(zhǔn),、穩(wěn)定以及快速響應(yīng)是決定阻抗匹配器這款產(chǎn)品性能好壞的重要指標(biāo),。因此，基于電容分壓采樣,、電流互感器采樣以及運(yùn)放電路等相關(guān)原理,，設(shè)計(jì)了一款純硬件電路的阻抗幅值、相位檢測(cè)回路,，并用仿真軟件ADS2021進(jìn)行模擬仿真實(shí)驗(yàn),，得到表征射頻電源和負(fù)載之間阻抗匹配程度的模擬量Urms。通過實(shí)驗(yàn)測(cè)試表明,，Urms越大表征射頻源與負(fù)載之間失配越嚴(yán)重,，功率傳輸效率越低；Urms越小表征射頻源和負(fù)載之間的匹配程度越好,，功率傳輸效率越高,。同時(shí)，通過改變母線信號(hào)的輸入功率,，得到Urms與輸入功率具有較高的線性相關(guān)性,，因此該檢測(cè)回路具有很好的穩(wěn)定性，能夠適用于寬范圍匹配器阻抗的幅值,、相位檢測(cè),。
關(guān)鍵詞：阻抗匹配,Urms,幅值-相位信號(hào),線性相關(guān)
中圖分類號(hào)：TN407
文獻(xiàn)標(biāo)志碼：A
DOI: 10.16157/j.issn.0258-7998.223543
中文引用格式： 姚龍,，李曉峰，馬聰偉,，等. 基于阻抗匹配器的二極管幅-相檢測(cè)電路設(shè)計(jì)[J]. 電子技術(shù)應(yīng)用,，2023，49(7)：120-125.
英文引用格式： Yao Long,，Li Xiaofeng,，Ma Congwei，et al. Design of amplitude-phase detection circuit for impedance match[J]. Application of Electronic Technique,，2023,，49(7)：120-125.
文獻(xiàn)標(biāo)志碼：A
DOI: 10.16157/j.issn.0258-7998.223543
中文引用格式： 姚龍,，李曉峰，馬聰偉,，等. 基于阻抗匹配器的二極管幅-相檢測(cè)電路設(shè)計(jì)[J]. 電子技術(shù)應(yīng)用,，2023，49(7)：120-125.
英文引用格式： Yao Long,，Li Xiaofeng,，Ma Congwei，et al. Design of amplitude-phase detection circuit for impedance match[J]. Application of Electronic Technique,，2023,，49(7)：120-125.
Design of amplitude-phase detection circuit for impedance match
Yao Long，Li Xiaofeng,，Ma Congwei，Guo Hui
(Jihua Laboratory,， Foshan 528000,， China)
Abstract： Nowadays, the competition in the field of domestic semiconductor largely depends on the competition of semiconductor equipment and core components, such as RF power supply, impedance match, etc. The anti-interference ability and stability of the equipment are important criteria for judging the quality of equipment. For the impedance match equipment, the accuracy, stability and fast response of the control loop are important indicators that determine the performance of this product. Therefore, this paper designs a hardware circuit about amplitude-phase signal detection loop based on the related principles of capacitor voltage sampling, current transformer sampling and op amp circuit, and uses the ADS2021 to obtain the analog quantity Urms representing the impedance matching degree between RF power supply and load. The simulation experimental results show that a larger Urms value indicates a greater mismatch between the RF power supply and load, and a smaller Urms value indicates a better match between the RF power supply and load. At the same time, by changing the input power of the bus signal, it is obtained that the Urms has a high linear correlation with input power, so the detection loop has good stability and can be applied to the detection of impedance match.
Key words : impedance match；Urms,；amplitude-phase signal,；linear correlation
0 引言
低溫等離子體技術(shù)如今向多元化發(fā)展，如射頻磁控濺射,、等離子體刻蝕,、反應(yīng)等離子體腐蝕、等離子體沉積等,，與等離子體設(shè)備相配套的阻抗匹配器也在為了滿足更多工藝要求不斷進(jìn)行技術(shù)升級(jí),，來實(shí)現(xiàn)多元化的工藝要求[1-3]。自動(dòng)阻抗匹配器實(shí)現(xiàn)阻抗匹配自動(dòng)化,，優(yōu)化工藝,，極大地整合了半導(dǎo)體工藝中自動(dòng)化過程，實(shí)現(xiàn)了無接觸式匹配過程[4-6],。
傳統(tǒng)匹配箱的匹配阻抗拓?fù)涠际堑筁型或者π型,，如圖1所示，因?yàn)槠ヅ渫負(fù)涔潭?，功率檢測(cè)精度決定后續(xù)匹配程度的準(zhǔn)確性[7-8],。傳統(tǒng)阻抗匹配器利用定向耦合器等方式，采集信號(hào)的入射電壓和反射電壓的幅值,，利用反射系數(shù)的幅值作為阻抗匹配網(wǎng)絡(luò)調(diào)節(jié)的目標(biāo)量,，因?yàn)槿鄙傧辔恍畔ⅲ瑢?dǎo)致匹配時(shí)間長(zhǎng),，精度低,，并且無法避免在阻抗失配時(shí)雙定耦檢測(cè)測(cè)試結(jié)果誤差偏大的問題[9-10],。
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作者信息：
姚龍，李曉峰,，馬聰偉,，郭徽
（季華實(shí)驗(yàn)室， 廣東 佛山 528000）
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